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Jobin Marc

Professeur HES associé

Hauptkompetenzen

Professeur HES associé

Büro: A232B

Haute école du paysage, d'ingénierie et d'architecture de Genève
Rue de la Prairie 4, 1202 Genève, CH

Bereich
Technique et IT

Hauptstudiengang
Microtechniques

BSc HES-SO en Microtechniques - Haute école du paysage, d'ingénierie et d'architecture de Genève

Matériaux
Nanotechnologies
Traitement statistique des données

MSc HES-SO en Engineering - HES-SO Master

Photovoltaïque

2025

Smart bio-nanocoatings with simple post-synthesis reversible adjustment

Wissenschaftlicher Artikel ArODES

Mikhail Kryuchkov, Zhehui Wang, Jana Valnohova, Vladimir Savitsky, Mirza Karamehmedovic, Marc Jobin, Vladimir L. Katanaev

Biomimetics, 2025, 10, 3, 163

Link zur Publikation

Zusammenfassung:

Nanopatterning of signal-transmitting proteins is essential for cell physiology and drug delivery but faces challenges such as high cost, limited pattern variability, and non-biofriendly materials. Arthropods, particularly beetles (Coleoptera), offer a natural model for biomimetic nanopatterning due to their diverse corneal nanostructures. Using atomic force microscopy (AFM), we analyzed Coleoptera corneal nanocoatings and identified dimpled nanostructures that can transform into maze-like/nipple-like protrusions. Further analysis suggested that these modifications result from a temporary, self-assembled process influenced by surface adhesion. We identified cuticular protein 7 (CP7) as a key component of dimpled nanocoatings. Biophysical analysis revealed CP7’s unique self-assembly properties, allowing us to replicate its nanopatterning ability in vitro. Our findings demonstrate CP7’s potential for bioinspired nanocoatings and provide insights into the evolutionary mechanisms of nanostructure formation. This research paves the way for cost-effective, biomimetic nanopatterning strategies with applications in nanotechnology and biomedicine.

Tissue engineering in vitro leaflet and 3-dimensional printing-based implant prototypes for infant mitral valve

Wissenschaftlicher Artikel ArODES

Martha I. González-Duque, Arielle Breuninger, Frédéric Leis, Julio B. Michaud, Shaginth Sivakumar, Vincent Pautu, Marisa E. Jaconi, Marc Jobin, Adrien Roux

BME Frontiers, 2025, 6, 0159

Link zur Publikation

Zusammenfassung:

Objective: This study engineers leaflet- and 3-dimensional (3D) printing-based implant prototypes for infant mitral valve repair via in vitro cultured mesoangioblasts isolated from the human fetal aorta (AoMAB). Impact Statement: Ultrahigh-molecular-weight polyethylene (UHMWPE) coatings, as well as 3D-printed gelatin methacrylate (GelMA) hydrogels for implants, represent new possibilities for devices used in mitral valve repair. Introduction: Mitral valve prolapse (MVP) repair in pediatric patients is challenging due to somatic growth, patient-prosthesis mismatch, reinterventions, infections, and thromboembolism. Tissue-engineered heart valves (TEHVs) offer potential solutions through conventional and 3D printing biofabrication. Methods: Four materials are evaluated: UHMWPE, UHMWPE coated with polyvinyl alcohol (PVA), UHMWPE coated with PVA and collagen, and 3D-printed (GelMA) hydrogels. The prototypes are characterized for micro/nanostructural, physicochemical (degradation, contact angle, Fourier transform infrared spectroscopy), and mechanical properties (simple strength tests, dynamic mechanical analysis) and assessed for cytocompatibility using AoMAB cells. A 3D printing mitral valve prototype is analyzed via immunostaining. Results: Results highlight UHMWPE coated with PVA and collagen as the most promising, with degradation (7.30 ± 18.71%), a hydrophilic contact angle (26.13 ± 1.45°), and biocompatibility (177.04 ± 68.92% viability). GelMA prototypes show superior viability (216.77 ± 77.69%) and scalability for 3D printing. Conclusion: UHMWPE coated with PVA and collagen and GelMA demonstrate strong potential for TEHVs, with AoMAB cells facilitating 3D culture and future personalized pediatric applications. Further in vitro validation and thrombogenicity assessments are needed.

2023

Detection of urological cancers by the signature of organic volatile compounds in urine, from dogs to electronic noses

Wissenschaftlicher Artikel ArODES

Oumar Gaye, Cheikh Bintou Fall, Mohamed Jalloh, Babacar Faye, Marc Jobin, Olivier Cussenot

Current Opinion in Urology, 33, 2023, 6, 437-444

Link zur Publikation

Zusammenfassung:

Urine volatile organic compound (VOC) testing for early detection of urological cancers is a minimally invasive and promising method. The objective of this review was to present the results of recently published work on this subject. Organic volatile compounds are produced through oxidative stress and peroxidation of cell membranes, and they are eliminated through feces, urine, and sweat. Studies looking for VOCs in urine for the diagnosis of urological cancers have mostly focused on bladder and prostate cancers. However, the number of patients included in the studies was small. The electronic nose was the most widely used means of detecting VOCs in urine for the detection of urological cancers. MOS sensors and pattern recognition machine learning were more used for the composition of electronic noses. Early detection of urological cancers by detection of VOCs in urine is a method with encouraging results with sensitivities ranging from 27 to 100% and specificities ranging from 72 to 94%. The olfactory signature of urine from patients with urological cancers is a promising biomarker for the early diagnosis of urological cancers. The electronic nose with its ability to recognize complex odors is an excellent alterative to canine diagnosis and analytical techniques. Nevertheless, additional research improving the technology of Enoses and the methodology of the studies is necessary for its implementation in daily clinical practice.

2019

Dielectric properties of SiO2:PMMA nanocomposites for energy storage

Wissenschaftlicher Artikel ArODES

Marc Jobin

Techconnect Briefs 2019, 2019, pp. 154-158

Link zur Publikation

Zusammenfassung:

We have made a SiO2:PMMA hybrid nanocomposite based on 150nm spherical silica nanoparticles synthetized by sol-gel method. A molecule containing a methacrylate group (TPM), was chemically grafted to the silica surface to improve the electrical performance. The filling factor of the nanonanocomposite was up to 20%vol. The ~1um thick nanocomposite films were deposited on polished steel by spin coating. Compared to similarly prepared PMMA films, the dielectric constant, as measured by BDS (proadband dielectric spectroscopy) was enhanced by a factor of two for the nanocomposite, and the disruptive electric field by a factor of 2.5. This eventually yields an overall improvement of the energy density by a factor of 12.5.

An electrosimulation cell device with patterned TiO2:Nb thin films as bio-electrodes

Wissenschaftlicher Artikel ArODES

Marc Jobin, Cédric Pellodi, Antonin Sandoz, Luc Stoppini, Cosmin Sandu, Giacomo Benvenuti

Techconnect Briefs 2019, 2019, pp. 419-422

Link zur Publikation

Zusammenfassung:

We present a cellular test device based on Nb:TiO2 (niobium dooped titania) transparent conductive oxide (TCO) as bio-electrodes. The device is intended to easily provide electrical stimuli to a given cell tissue and to monitor its response. The Nb:TiO2 thin film deposition were performed with combinatorial chemical beam epitaxy (C-CBE) which allows for linear and well controlled gradients of both Nb concentration (ranging from 3% to10%) and oxide thickness in predefined directions (usually orthogonal). We have systematically characterized the Nb:TiO2 films with Atomic Force Microscopy, Scanning White-light Reflectometry, and sheet resistance Finally, we show the device, i.e the electrodes design and patterning in order to perform to electrical stimuli to the various ways to measure the cell’s response.

2016

A combinatorial chemical beam vapour deposition approach to tune the electrical conductivity of Nb:TiO2 films via Si co-doping

Wissenschaftlicher Artikel ArODES

C. S. Sandu, E. Wagner, S. Harada, G. Benvenuti, W. Maudez, Marc Jobin, Cédric Pellodi, Paul Muralt

Thin Solid Films, 2016, vol. 615, pp. 265-270

Link zur Publikation

Zusammenfassung:

Chemical beam vapour deposition (CBVD) is a thin film deposition technique operated under high vacuum conditions in which film growth occurs through the thermally activated chemical decomposition of precursor molecules at the substrate surface. This technique was used in a combinatorial mode to investigate the influence of Si doping on the properties of Nb-doped TiO2 films, a well-known transparent conductive oxide material. The ternary oxide system (Si, Nb, Ti, O) displays good intermiscibility between the elements. By adding a Si precursor flow gradient to homogeneous Ti and Nb precursor flows, it was demonstrated that the resistivity of deposited films increased by over 5 orders of magnitude (from 1 to 100,000 Ω·cm) with Si doping levels between 2 and 21at.%. Meanwhile, only a slight variation of the refractive index of about 10% was observed. A fundamental film morphology study showed that the conductivity variation was due to Si segregation at the grain boundaries of the conductive Nb:TiO2 structure.

2009

Local dynamic mechanical analysis

Wissenschaftlicher Artikel ArODES

Raphael Foschia, Marc Jobin, Stefan Hengsberger

Micron, 2009,vol. 40, no. 1, pp. 51-55

Link zur Publikation

Zusammenfassung:

While new materials with tailored properties appear every day, the need of appropriate characterization tools is still an important concern. Analyses of thin films on thick substrate are often highly influenced by the substrate properties. A dynamical nanoindentation system has been designed and built through the integration of a nanoindenter head equipped with capacitive displacement sensing, scanning probe microscope with related XYZ scanning electronics and an additional transducer for sample actuation. Our Local-Dynamic Mechanical Analysis (L-DMA) setup allows for both, tip and sample modulation mode what somehow contrasts with commercially available systems. This issue allows for direct comparison between both techniques and therefore for consistent quantitative mechanical measurements. The system offers two distinctive measurement techniques, local mechanical spectroscopy and mechanical imaging modes. Bulk materials as well as thin films of ceramics and polymers have been used for testing and validating the setup. The instrument has been modeled in sample modulation mode and experimental results obtained for different materials were compared with simulation data.

2008

Improving the resolution of interference microscopes

Wissenschaftlicher Artikel ArODES

Marc Jobin, Raphael Foschia

Measurement, 2008, vol.41, no. 8, pp. 896-903

Link zur Publikation

Zusammenfassung:

We have made an interference optical microscope (IOM) capable of improved resolutions, both vertically and laterally. Atomic steps of graphite have been imaged in phase shift mode (PSM) at large field of view through a proper averaging time during acquisition. We discuss the influence of the illumination and the CCD resolution on the ultimate achievable vertical resolution. To improve the lateral resolution, we report on the integration of the IOM to an atomic force microscope (AFM) in order to take advantage of the 2 nm resolution provided by AFM.

2007

Force modulation and dynamic nanoIndentation microscopy

Wissenschaftlicher Artikel ArODES

Raphael Foschia, Marc Jobin

Journal of Physics: Conference Series, 2007, vol. 61, pp.307-311

Link zur Publikation

Zusammenfassung:

We have made a Dynamic Nanoindentation Microscope (DNM) setup based on sample modulation, in order to allow a direct comparison between various dynamical mechanical measurement techniques such as Force Modulation Microscopy (FMM) and Dynamic Mechanical Analysis (DMA). The microscope is integrated to a standard Atomic Force Microscope (AFM) and uses a commercial nanoindentation system. Instead of the standard bimorph and force modulation configuration, we used a stacked ceramic sample actuator in displacement modulation. Both DMA measurements and DNM imaging were performed on each sample for the determination of the reduced, storage and loss modules, and a good agreement between the techniques have been found. Compared to FMM, we show that DNM has the advantage of always keeping the same contrast in the viscoelastic images as a function of the frequency.

2006

Absolute thickness imaging of PMMA layer on corrugated transparent substrate by scanning white light interference microscope

Wissenschaftlicher Artikel ArODES

Marc Jobin, Raphael Foschia

Microscopy and Microanalysis, 2006, no.12, supp. no. 2, pp. 1774-1775

Link zur Publikation

2025

Photovoltaic panel with removable solar cells

Konferenz ArODES

Ilyas Siouda, Marc Jobin

2025 IEEE 53rd Photovoltaic Specialists Conference (PVSC)

Link zur Konferenz

Zusammenfassung:

With the aim of meeting the needs of both the energy transition and the circular economy, it is imperative to develop photovoltaic panels with removable solar cells that can be reconditioned. We present a configuration of such a panel with three variants of charges collections on the front face. These three variants were fabricated and assembled in an inert environment (N2 glovebox). Their PV performances before and after a test degradation were analyzed. Anticipating an issue concerning ageing, H20 and O2 sensors were integrated into the prototypes to assess ant interpret the evolution of PV performances in a climatic chamber. The results, both in terms of tightness and PV performance degradation, are satisfactory, especially for one of the variants. Several improvements are proposed.

2023

Development of a liquid interferometric optical microscope (L-IOM) in phase-shift mode with standard Mirau objectives

Konferenz ArODES

Marc Jobin

Proceedings of SPIE Optical Metrology, 26-29 June 2023, Munich, Germany ; Proceedings Volume 12618, Optical Measurement Systems for Industrial Inspection XIII

Link zur Konferenz

Zusammenfassung:

We have developed an interferometric optical microscope (IOM) in phase shift mode (PSM) compatible with standard liquid cells and which uses non-immersive, standard and commercially available Mirau objectives. A 15mW He-Ne laser is used for the illumination and the induced speckle pattern in canceled with a rotating diffusing glass. The interferograms displaying the interference fringes are shown in air and in water for various illumination conditions. We show a detailed comparison of the topography obtained in air and in water in HOPG with our liquid IOM (L-IOM). The noise level is very similar in air and in water and is below 1nm.

2018

Thick films of HITCI:PMMA as luminescent solar concentrator for photovoltaics windows

Konferenz ArODES

Marc Jobin, Cesar Ruiz Diaz

Proceedings of the 35th European Photovoltaic Solar Energy Conference and Exhibition (EU PVSEC), 24-28 September 2018, Brussels, Belgium

Link zur Konferenz

Zusammenfassung:

We have investigated the potential use of HITCI molecules in PMMA for use as a luminescent solar concentrator (LSC) in a photovoltaic (PV) window, where the LSC layer is used to direct the infrared solar radiation towards silicon solar cells located inside the window’s frame. On small sample with various HITCI concentrations, Stokes shift in the range of 70nm to 80nm have been measured. The LSC layer as an IR waveguide shows a decay length of 12.9mm-1. Implementation on a real size window (20cm x 20cm) shows only marginal improvement compared to a similar window without any LSC layer.

2017

Energy performance of a building with split tandem photovoltaic windows

Konferenz ArODES

Marc Jobin, Basile Grandjean

Proceedings of EU PVSEC 2017, 33rd European PV Solar Energy Conference and Exhibition, 25-29 September 2017, Amsterdam, The Netherlands

Link zur Konferenz

Zusammenfassung:

We have made a 20cm x 20cm tandem photovoltaic (PV) window and developed a numerical model to investigate the energy performance of a building that would be equipped with such PV windows. The inside of the double-glazed window incorporates a tilted dichroic filter which is transparent for visible solar light and reflecting for near infra-red light. As a result, the transmitted visible photons are partially absorbed by a transparent organic solar cell while the reflected NIR photons are sent to silicon solar cells located in the frame of the window. To investigate the potential benefit of the technology, the net energy balance (NEB) simulation includes the choice of the location, the use of the building (residential or office), the percent coverage of the façade by the PV windows, etc. Several case studies are presented to emphasize the key points which influence the net global benefit of the window.

2015

Concept of a split tandem photovoltaic window

Konferenz ArODES

Marc Jobin, Cédric Pellodi

Proceedings of 2015 IEEE 42nd Photovoltaic Specialist Conference (PVSC), 14-19 June 2015, New Orleans, LA, USA

Link zur Konferenz

Zusammenfassung:

We present a concept of a split tandem photovoltaic window, where the larger wavelengths solar radiations are sent towards horizontal silicon solar cells while short wavelength solar radiations are directed on transparent large band gap solar cells, either dye-sensitized or organic solar cells (DSSC and OSC respectively). We first evaluate the expected enhancement in them of conversion efficiency and then describe the construction of a mini module of this window.

2014

Organic solar cells improvement with quantum dots, up-converters and MoO3 hole transport layers

Konferenz ArODES

Marc Jobin, Cédric Pellodi

Photonics for Solar Energy Systems ; Proceedings of SPIE Photonics Europe, 14-17 April 2014, Brussels, Belgium

Link zur Konferenz

Zusammenfassung:

We report on the power conversion efficiency (PCE) enhancement for organic solar cells (OSCs) based on several approaches. A standard cell composed of an indium tin oxide (ITO) anode, P3HT/ PCBM active layer, PEDOT:PSS hole transport layer and an aluminum cathode is used as a reference. We investigate the effects of the following three modifications. We first incorporate CdSe quantum dots (QDs) in the photo-optically active P3HT/PCBM blend in order to enhance the optical absorption. In opposite to other studies, QDs are not used here to replace the donor material (PCBM), and we always measured an enhanced PCE compared to the standard cell with a QDs:P3HTPCBM volume ratio up to 1:5. As a second modification, NaYF4:Yb,Er up conversion (UC) microcrystals are incorporated into a TiO2-x sol-gel to form an additional layer used to convert IR photons to blue and green photons. Again, OSCs with UC layer showed an improved PCE compared to the reference cell. The PCE enhancement is both attributed to the IR light absorption and to a better electron transport between the active layer and the cathode due to the electron transport layer capabilities of TiO2-x. Finally, MoO3 layer is used to replace the PEDOT:PSS layer as hole transport layer (HTL). This layer is deposed either by thermal evaporation or by spin coating from a sol-gel solution. We found evaporation better in terms of thickness control and reproducibility. It has been demonstrated that the PEDOT:PSS HTL can be replaced by MoO3, and the thickness of this MoO3 layer strongly affects the PCE of the cell. The maximum PCE was obtained with a thickness of 40nm, and again is better that the reference cell.

2011

Characterization of P3HT:PCBM:CdSe hybrid solar cells

Konferenz ArODES

Stéphane A. Jotterand, Marc Jobin

Proceedings of E-MRS Spring Meeting 2011, Symposium S: Organic Photovoltaics: Science and Technology, 25-29 April 2011, San Francisco, USA ; Energy Procedia

Link zur Konferenz

Zusammenfassung:

We have investigated the effect of adding CdSe quantum dots (QDs) with their hexadecylamine (HDA) ligands coating in ITO/SPT/P3HT:PCBM/Al bulk heterojunction (BHJ) organic photovoltaic cells (OPV). At first, we found that the optimal thermal treatment was a post cathode deposition annealing, due to an effective surface area 10.8% larger compared to a pre-cathode thermal treatment. Absorbance spectra for hybrid cells with incorporated QDs diameters ranging from 2.2 nm to 6.3 nm show the largest absorbance for 3.3 nm QD diameter. The 3.3 nm QD also gives the lowest power performance. We explained the general degraded performance as an effect of the HDA ligands coating around QDs. Finally, in order to track the lateral inhomogeneity of the final device, we have mapped the I-V over the entire surface cell (2 cm x 2 cm) with a definition of 200 pts x 200 pts.

2010

Real time interferometric microscopy in liquids

Konferenz ArODES

Marc Jobin, Raphael Foschia

Proceedings of Biomedical Optics 2010, 11-14 April 2010, Miami, Florida, United States

Link zur Konferenz

Zusammenfassung:

We have made a Phase Shift Mode Interferometric Optical Microscope (PSM-IOM) operating in liquid and in real time (video rate). We thus implemented for IOM two of the widely accepted basic advantages of Digital Holography Microscopy. Using a modified Tolansky objective to compensate the phase shift from the liquid cell window, we can measure without immersing any part of the microscope objective. The fringe visibility was reduced by 14% in water compared to air. In order to follow surface nano-topography at video rate, we have implemented a Fourier Transform based algorithm which computes the phase map from a single interferogram. A comparison to the Hariharan algorithm is given. As a proof of concept, the nano-evolution of a surface profile of Cu in sulphuric acid is shown.

2009

Surface and mechanical properties of laser melted maraging steel

Konferenz ArODES

Marc Jobin, Raphael Foschia, François de Mestral, Eric Vittecoq, Denis Boisseleau, Alexis Saitta, Pierre Escourou, Guillaume Vansteenkiste, Cyril Gouverd, Laurent Cataldo, Carmen Sanz, Oscar Gonzalo

Proceedings of EuroPM 2009, 12-14 October 2009, Coppenhagen, Denmark

Link zur Konferenz

Zusammenfassung:

In order to drastically reduce the cycle and cost production of engine parts in the transport industry, we have developed laser powder melting processes to produce several key engine parts in maraging steel, Co-Cr and Inconel 718. Results presented here concerns maraging steel only. Laser melted samples were polished with three different treatments: Abrasive Flow Machining (from Extrudehone), Vibratory finishing (from Rosler) and MMP (Micro Machining Process from BESTinCLASS). The dimensional tolerance after polishing was 5µm. The resulting surface topographies were measured with Stylus Profilometry and Atomic Force Microscopy. The MMP process allows reducing the rms roughness (Rq) to 12 nm only for a 20µm x 20µm field of view. In order to investigate the surface treatments in terms of what characteristic length (i.e spatial frequency) have been filtered, we present the results with the help of power spectral density. Concerning the mechanical properties, the anisotropy of fatigue and tensile strength is not significant as a consequence of the direct melting process compared to sintering.

2008

High resolution in interferometric microscopy

Konferenz ArODES

Marc Jobin, Raphael Foschia

Proceedings of EMC 14th European Microscopy Congress 1–5 September 2008, Aachen, Germany

Link zur Konferenz

Zusammenfassung:

Interferometric optical microscopes (IOM) are very powerful 3D metrology tools which use integrated interferometers inside optical objectives. In Phase Shift Mode (PSM) [1], they can reach subnanometer vertical resolution but the lateral resolution, as any far-field optical system, is limited by diffraction to typically 0.5 um. They have a widespread use in microfabrication industries (microelectronics and MEMS).

Measurement of nanometric deformation of thin membranes under controlled mechanical loads

Konferenz ArODES

Marc Jobin, Vladimir Sidorenko, Raphael Foschia

TechConnect Briefs ; Nanotechnology 2008: Materials, Fabrication, Particles, and Characterization – Technical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, 1-5 June 2008, Boston, MA, USA

Link zur Konferenz

Zusammenfassung:

The accurate mechanical characterisation of thin membranes is recognized of prime importance for the development of membrane-based MEMS. To address this issue, we have built a measurement system which uses a nanoindentor to apply a well controlled force on one side of the membrane, while the deformation is recorded simultaneously on the other side with a home-made interferometric microscope. The use of a nanoindentor ensures a highly localised load on the membrane and the interferometric microscope allows us to measure deformations down to nanometric scale. The available forces enable deformations ranging from a few nanometers to membrane rupture. We have used optically transparent silicon nitride membrane up to 500nm thick The deformation is totally reversible without any measurable residual stress for loads up to 1000 uN. We measured rupture for loads ranging from 1600uN to 1700uN. The measured membrane spring constant at the center of the membrane is 169 N/m, close to the expected 140N/m given by the theory. The measured spring constant increases up to 301 N/m when the tip is brought close to a corner. Clear nanometric deformation of the membrane can be obtained under successive loads.

2007

Use of light-emitting diode (LED) in interference microscopy

Konferenz ArODES

Marc Jobin, Raphael Foschia

Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies III ; Optical Engineering + Applications, 20 September 2007, San Diego, California, USA

Link zur Konferenz

Zusammenfassung:

We present a systematic investigation of the use of LED as light sources for interference microscopy, in comparison with more standard halogen illumination. For translation height mode (also known as vertical scanning or low coherence microscopy), five white LED-based illuminations setup have been tested, including the use of filters to remove the shoulder in the blue region often encountered in such LED. For the six white light illuminations (five LED plus halogen), we have measured the irradiance spectra and calculated and measured the corresponding correlograms. The influence of the combined effect of the illumination spectra and a dispersive phase shift on the calculated height reconstruction is shown for a center-of-mass algorithm. In phase shift mode, both monochromatic LED and white LED with inteference filters have been used. Blue LED illumination improves the lateral resolution compared to red illumination, a task which can be done with halogen lamp only with very reflecting sample due to its low power in the blue wavelengths. All measurements have been performed with our home-made interference microscope, which is described in Proc. SPIE 6188,61880T (2006).

2006

Nanometrology for MEMS :

Konferenz ArODES

combination of optical interference, atomic force microscopy, and nanoindentor-based actuator

Marc Jobin, Philippe Passeraub, Raphael Foschia

Optical Micro- and Nanometrology in Microsystems Technology

Link zur Konferenz

Zusammenfassung:

We show the integration of a home-made interference optical microscope (IOM) with an Atomic force microscope, as well as the combination of IOM with a nanoindentor. Such combined instruments have many applications in the characterisation of MEMS/NEMS. As an illustrative example, we have used a MEMS accelerometer with capacitive read-out. Surface topography and defects have been measured with an IOM/AFM setup, as well as the bending and the torsion of the inertial mass while a calibrated force is applied with the nanoindentor probe on an off-axis location of the inertial mass.

2005

Inegrated optical profiler and AFM :

Konferenz ArODES

a 3D metrology system for nanotechnology

A. Du, Marc Jobin, Raphaël Foschia

Proceedings of NSTI Nanotech, the Nanotechnology Conference and Trade Show, 8-12 May 2005, Anaheim, CA, USA

Link zur Konferenz

Zusammenfassung:

A white light interference optical profiler (WL-IOP) operating in the vertical scanning interferometry (VSI) mode has been home-made developed and integrated into a commercial Atomic Force Microscope (AFM). The result is a 3D metrological tool operating with sub-nanometer resolution vertically over a wide range laterally: from 1mm down to 10nm. This is a faster and in many case a higher performance alternative to the more standard stylus profiler / AFM combination.

Errungenschaften

PEOPLE@HES-SO
Verzeichnis der Mitarbeitenden und Kompetenzen

Jobin Marc

Professeur HES associé

Hauptkompetenzen

Science des matériaux

Nanotechnology

Instrument development

Photovoltaïque

Professeur HES associé

PEOPLE@HES-SO Verzeichnis der Mitarbeitenden und Kompetenzen

Jobin Marc

Professeur HES associé

Hauptkompetenzen

Science des matériaux

Nanotechnology

Instrument development

Photovoltaïque

Professeur HES associé

PEOPLE@HES-SO
Verzeichnis der Mitarbeitenden und Kompetenzen